H. J. Lee, D. Kim, W. S. Choi, C. Kim, S.-J. Choi, J.-H. Bae, D. M. Kim, S. Kim, and D. H. Kim*
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Materials Science in Semiconductor Processing, vol. 153, p. 107183, DOI: 10.1016/j.mssp.2022.107183, 2022-10