G. Jung1, S. Hong1, Y. Jeong1, W. Shin1, J. Park1, D. Kim1, J.-H. Bae2, B.-G. Park1, and J.-H. Lee1(1 Seoul National University, Korea, 2 Kookmin University, Korea)
"H2S Gas Sensing Characteristics of Si FET-type Gas Sensor with Localized Micro-heater"
The 28th Korean Conference on Semiconductors, 2021-01