[54] "Characterization Technique for Interface Traps in Si Nanosheet GAA MOSFETs through Subthreshold I-V Characteristics"

H. B. Yoo† , H. Kim†, Y. Lee, J. H. Ryu, J. Y. Park, H. J. Yang, J.-H. Bae, D. H. Kim, S.-J. Choi* , D. M. Kim*

"Characterization Technique for Interface Traps in Si Nanosheet GAA MOSFETs through Subthreshold I-V Characteristics"

2022 IEEE 22nd International Conference on Nanotechnology (NANO),2022-07-04