[48] "Influence of rf power in the sputter-deposition of a- IGZO film on transient drain current of a- IGZO thin-film transistors"

D. Y. Lee, J. Park, S. Lee, S. J. Myoung, J.-H. Bae, S.-J. Choi, D. M. Kim, and D. H. Kim*

"Influence of rf power in the sputter-deposition of amorphous InGaZnO film on transient drain current of amorphous InGaZnO thin-film transistors"

The 30th Korean Conference on Semiconductors,2023-02