[18] "Effect of the ALD temperature on switching characteristic in Cu-based CBRAM with the solid electrolyte of Al2O3"

I. Chae, J. T. Jang, S. Park, W. S. Choi, J.-H. Bae, S.-J. Choi, D. M. Kim, and D. H. Kim

"Effect of the ALD temperature on switching characteristic in Cu-based CBRAM with the solid electrolyte of Al2O3"

The 28th Korean Conference on Semiconductors, 2021-01